The IEEE Young Professionals Engagement Series (YES) is organized by the IEEE Sensors Council YP Committee.
Speaker: Peter Steeneken, Professor at Delft University of Technology; Former Principal Scientist at NXP
Date: June 30, 2021
Time: 2:00 PM Central European Time
Registration: Free, but required. Sign up using the Google Form: https://bit.ly/2SwsYNj. You will be sent the meeting link after you register.
Talk Title: Graphene for Next-Generation Nanomechanical Sensors
In this presentation, recent progress on the route from MEMS toward 2D NEMS sensors will be discussed [1,2]. After introducing fabrication and characterization methods for studying the static and dynamic motion of suspended ultrathin membranes, several concepts for sensing gas pressure using atomically thin membranes are demonstrated, including static, resonant and Pirani pressure sensing.
Challenges to meet requirements on yield, sensitivity and lifetime are discussed and advances in optical and electronic calibration and readout methods using commercial low-cost electronics are discussed, aiming towards commercially viable graphene pressure sensor products as part of the Graphene Flagship sensors workpackage. Gas sensing concepts for analyzing gas composition based on permeation of gases through graphene nanopores are discussed and the feasibility of graphene gas pumps is shown.
About the Speaker
Peter Steeneken received the M.Sc. and Ph.D. degree in experimental solid state physics from the University of Groningen, the Netherlands. In 2002, he joined Philips Research and NXP Research in Eindhoven, as an industrial scientist focusing on the modeling, characterization and reliability of CMOS MEMS devices for sensors, actuators and RF applications.
Since 2013, he is professor of Applied Nanophysics at the Kavli Institute of Nanoscience in Delft and since 2017 he is full professor at TU Delft’s Precision and Microsystems Engineering Department, chairing the section Dynamics of Micro and Nanosystems.
Prof. Steeneken currently leads the sensors workpackage of the Graphene Flagship and the large national project Plantenna on plant-based sensor technology. He has authored more than 100 journal and conference publication and holds 44 granted US patents. His research focuses on bridging the gap between fundamental physics and applications, with a focus on high frequency nanomechanical sensor devices.